What does ArF mean?

Argon Fluoride (ArF) Laser is a type of excimer laser. An excimer laser is a type of ultraviolet Laser consisting of a mixture of noble gas such as xenon, krypton, or argon and a reactive gas such as chlorine or fluorine, which when subjected to high pressure and electrical stimulation emit stimulated Ultraviolet (UV) light.

Note:
LASER stands for Light Amplification by Stimulated Emission of Radiation.
The term excimer is short for 'excited dimer'.
A dimer is a molecule composed of two monomers that are similar in structure and joined by a chemical bond.

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